Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)

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	Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
	Author: P. Rai-Choudhury (Editor) Published: 1997-03-14
	List price: $119.00 Our price: $116.62	Usually ships in 24 hours As of: December 03rd, 2008 05:50:07 PM

Customer comments on this selection. For people interested in MEMS This is a very useful book in MEMS. The content covers wet and dry etching, focused ion beams, plating, sensors, acuators, micro-optical devices and thin film transistor liquid crystal display. For people interested in advanced lithography The book gives detailed description in electron beam lithography, X-ray lithography, deep-UV resist lithography and photomask fabrication, etc.
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