|
Lithography Process Control (SPIE Tutorial Texts in Optical Engineering Vol. TT28) |
Author: Harry J. Levinson
Published: 1999-02 |
List price: $48.00
Our price: $48.00
|
Usually ships in 24 hours
As of: December 03rd, 2008 04:36:26 PM
|
|
|
Customer comments on this selection.
 Outstanding
Indispensable reference for process engineers. Very good coverage of the basics. I would also suggest you these references:
i. Microlithography: Science and Technology by Bruce W. Smith
ii. Principles of Lithography by Harry J. Levinson
They are complementary. Enjoy!
 Great textbook for SPC & DOE's
This is one of the best texts I've seen in terms of understanding SPC's and DOE's for microlithography. This text is very very helpful for setting up SPC's for lithographic processes. It also helps greatly in setting up DOE frameworks for lithographic process development.I would definitely recommend this for anyone in the lithographic field.
|
|
Our Motorcycle book picks:
|
|
